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Many processes require the use of hazardous gases which can be flammable, toxic, or pyrophoric. Industry standards and government regulations mandate the proper storage and safe delivery of these gases to the process tools to ensure that hazards to personnel are minimized. Post process effluent gases also need to be properly treated and neutralized to meet environmental safety standards.
CVD Equipment Corporation offers a complete line of gas storage, gas delivery, and gas abatement systems to meet any process requirement. Our turnkey solutions allow you to configure a totally integrated system, including safety interlocks and interconnecting gas lines, which can be completely tested in our factory prior to shipment.
Please contact us for further details. |