Selenization and Sulfurization System

The selenization and sulfurization process can be done by rapid thermal processing (RTP) using high temperature and precursors such as diethylselenide (DESe) and H2S. This process is performed after depositing CIGS, CIS, and CIGSS thin films.

We provide selenization and sulfurization equipment for batch R&D processes used in research and large scale production. (Production platforms available upon request. Please contact us for further details)

Features include:

• Complete set of 5” quartz process tube
• Argon Glovebox for handling air sensitive substrates
• Computer Control System
• Six (6) gas lines with individual flow rate controls
• Static Mixer for optimum gas mixing
• Integrated vacuum control system for operation from 1 to 740 Torr and pump-down of a clean and dry chamber to a base pressure of <50 millitorr
• Infrared Heated with internal multi-point temperature control system
• Process Temperature – up to 700 degree Celsius @ >20 degrees Celsius/Second up to 600 Celsius
• Safety control system
• Factory training on System Start-Up, Operation
• Onsite installation & training

Options include:

• Additional Mass Flow Controlled Gas Line
• Gas Leak Detection
• Low Pressure Vapor Delivery System of Diethyl Selenide Liquid Precursor
• Solid source selenization using a closed box and an independent Selenium source heater
• Exhaust Gas Conditioning System with NaOH recirculation system with pH monitoring

CVD offers turn-key system capabilities with support equipment such as Gas Cabinets and Exhaust Gas Conditioning Systems. All major components from one vendor makes interfacing easy. CVD manufactures EasyGas™ gas cabinet is capable of delivering a variety of toxic and hazardous gases. The EasyExhaust™ System will thermally pyrolyze and wet scrub the process effluents through the First Nano division.

Please visit our First Nano website for more details on the EasyTube^® SAS (selenization and sulfurization equipment)