Ultra High Purity (UHP) Gas Delivery

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CVD Equipment manufacturers process gas and chemical panels through our SDC division.

Our UHP Manual Gas Panels are designed for high & low pressure, ultra-high-purity (UHP) gas delivery. Typically used for non-hazardous purge and process gas delivery applications, the MicroLine™ Series offers 1, 2, 3, 4 and 6-Valve designs. Our plumbing design ensures low entrapped volumes and minimized deadlegs for increased purity. The modular design concept allows the customer to tailor each system to meet their safety, process, purity AND budgetary goals. The product configurations range from the simplest 1-Valve design for nonhazardous use up to a 6-Valve design that offers HIGH PRESSURE VENT, LOW PRESSURE VENT, DEEP PURGE and venturi-assisted EVAC.

MicroLine™ Series (UHP) Gas Panels can also be fitted with a myriad of options including pressure relief, filtration, restrictive flow orifices, flexible pigtails and more. All components and fittings are UHP grade 316L SS or VAR (20Ra standard, 10Ra optional). OEM discounts & private-labeling services are available.

Please contact us for further details.

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