Cluster Tools

CVD Equipment offers a variety of customized cluster tools to meet your process requirements.  A cluster tool system is typically configured with a loadlock chamber, a transfer chamber and two to three process chambers which can be:

• CVD
• UHVCVD
• PECVD
• MOCVD
• RTP
• Etching
• Thermal Evaporation
• Sputtering
• E-Beam evaporation

The wafer is transfered between chambers under a vacuum using a robotic arm to prevent exposure to air which prevents oxidation and contamination.

Please contact us for further details.