Bubbler/Flash Evaporator

Bubbler/Flash Evaporator is used for liquid precursor delivery in CVD processing. We manufacture stainless steel and quartz bubblers designed to deliver ultra high-purity precursors to the reaction zone during a fabrication process. Manufactured in a 10/100 clean room ensures product quality and integrity. Bubblers are pneumatically tested 1.0 x 10^-9 ATM*CCS to ensure leak-free service.

Some options include:

• Dual-valve, equipped with fill port and VCRT inlet and outlet valves

• Electropolished 316L stainless steel free of mechanical defects and foreign chemical contaminants

Custom built bubblers to meet your equipment specifications are also available.

For more information please contact our SDC Division.