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Our custom equipment is used for leading edge research and high volume production for many applications such as:

Some of our products include:

We also provide access to our Application Lab where Nano/Solar/Energy material processes can be developed in conjunction with First Nano/CVD research scientists.

Upcoming Shows & Conferences:

cvd equipment at mrs 2012 spring
NanoManufacturing Conference & Exhibits
Society of Manufacturing Engineers (SME)
March 28th - 29th 2012
Hynes Convention Center, Boston, MA USA
Booth# B106

More 2012 Tradeshows

EasyTube 2000

easy tube 2000

Turnkey solution for nanomaterial synthesis
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EasyTube 3000

easy tube 3000

The most advanced tool for the synthesis of nanotube...
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EasyTube™ 6000

easy tube 6000

Offered for Carbon Nanotubes (CNT), Nanowires, Oxidation, Annealing,...
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LPCVD - High Purity Gas Delivery System

lpcvd gas delivery system

Including Mass Flow Controllers, Pneumatically operated valves...
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LPCVD - End Cap Assembly

lpcvd end cap assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Vacuum Pump

lpcvd vacuum pump

Piston pump to evaculate the loadlock to equalize pressure with...
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LPCVD - Hot Wall Furnace Chamber

lpcvd boat of wafers

Boat of wafers loading into Hot Wall Furnace Chamber...
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UHVCVD - Multi-Chamber Cluster Tool

uhvcvd multi chamber tool

Dual chamber UHVCVD/LPCVD for Si/SiGe epitaxial deposition...
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UHVCVD - Chamber Cluster Tool

uhvcvd chamber cluster tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

uhvcvd quartz holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

PECVD Process Chamber

Contains the RF Matching Unit delivering power to the upper electrode within...
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Metalorganic CVD System

metalorganic cvd system

For compound semiconductors material deposition...
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Metalorganic CVD System - Chamber

Metalorganic CVD System - Chamber

Offers Stainless Steel or Quartz Chamber...
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Multi-Chamber Cluster System

multi chamber cluster system

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Reel to Reel CVD System

Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Infrared Heated Susceptor

Infrared Heated Susceptor shows portion of Reel to Reel...
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Atomic Layer Deposition System - Process Chamber

Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Multi-head Chamber

Isolated Showerhead/Heater in our ALD systems...
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Liquid Phase Epitaxial Reactor System

Liquid Phase Epitaxial Reactor System

Provides optimum control over III-V and II-VI wafer processing...
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Liquid Phase Epitaxial Reactor System - Loadlock

LPE Loadlock

LPE with loading tray to transfer to and from the glove box...
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Liquid Phase Epitaxial Reactor System - Airgun with Glove Ports

LPE Airgun with Glove Ports

Inert gas spray gun within glove box...
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Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

LPE 3 Zone Rolling Furnace

Rolling furnace in retracted system.
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Rapid Thermal Processing - Chamber

Rapid Thermal Processing - Chamber

Provides extremely rapid heating and cooling of substrates...
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Rapid Thermal Processing - Infrared Lamp

Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Rapid Thermal Processing - Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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Rapid Thermal Processing - Hot Process Chamber

Hot Process underpower from end view...
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Rapid Thermal Processing - Chamber Lid

chamber lid

Infrared lamp array on the RTP chamber lid...
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Hydrogen Chloride Etching System

Hydrogen Chloride Etching System

Process Chamber and Operator control station for Hydrogen Chloride Etching Systems...
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Customized System - Deluge System

Deluge System

Provides protection within explosive environments using infrared sensors....
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Customized System - RTP Process Chamber

RTP Process Chamber

Infrared Heated Process Chamber.....
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Supporting Equipment - Gas Cabinet

Gas Cabinet

Designed to cover a wide range of cylinder gas delivery applications...
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Fabricated Quartzware - Wafer Boats

Fabricated Quartzware - Wafer Boats

Standard and customized wafer boats for various wafer sizes...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Flame Polishing Quartz

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

uhv wafer transfer chamber

CVD's provides a 4 port UHV Wafer Transfer Chamber...
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Motion Control/Vacuum Chamber

Motion Control/Vacuum Chamber

Wafer Transfer Chamber & Sputter Etch Chamber...
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Boron Doped ZnO LPCVD Thin film Coating

Boron Doped ZnO LPCVD Thin film Coating

Boron Doped ZnO deposited at 150° by LPCVD process, best film 5 Ω/□, 2.5 µm, 1.3 10-3 Ωcm....
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Boron Doped ZnO LPCVD Thin film Coating Graph

Boron Doped ZnO LPCVD Thin film Coating Graph

Transmission & reflection of Float Glass sheet & Boron doped Zinc Oxide coated Float Glass sheet with...
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Boron Doped ZnO LPCVD Thin film Coating - Side View

Boron Doped ZnO LPCVD Thin film Coating side view

Side view of B:ZnO LPCVD Thin Film Coating...
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Boron Doped ZnO LPCVD Thin film Coating - Top View

Boron Doped ZnO LPCVD Thin film Coating top view

Top view of high magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Boron Doped ZnO LPCVD Thin film Coating - Top View Lower

Boron Doped ZnO LPCVD Thin film Coating top view lower magnification

Top view of lower magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Boron Doped ZnO LPCVD Thin film Coating - Top View Lower

Boron Doped ZnO LPCVD Thin film Coating top view lower magnification

Top view of lower magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO

Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO coatings

Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO coatings on soda lime glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Side view of F:ZnO APCVD Thin Film Coating

Side view of F:ZnO APCVD Thin Film Coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Magnified side view of F:ZnO APCVD  Thin Film Coating

Magnified side view of F:ZnO APCVD Thin Film Coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Front view of F:ZnO  APCVD

Front view of F:ZnO APCVD Thin Film Coating...
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CVDGraphene™ on a 4" Silicon Wafer

cvdgraphene-4inch-wafer

CVDGraphene™ on a 4" Silicon Wafer with SiO2/Ni film...
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CVDGraphene™ (Cu) Copper Foil

cvdgraphene on copper foil

Monolayer CVDGraphene™ on Cu Foil 50 – 300 mm x 50 – 250 mm...
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CVDGraphene™ Raman Spectra

CVDGraphene™ Raman Spectra

Raman spectra from single layer CVDGraphene™ film onto a SiO2 film from Graphene layer grown on a Copper Foil...
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Customer Testimonials

"Impressed with the turn-key reliability as well as extensive safety features of this LPCVD system...custom system design effort to...

-Jie Xiang
Assistant Professor of Electrical and Computer Engineering
Univ. of California, San Diego

More Testimonials

01/09/12
CVD Equipment Corporation – 2011 New Orders Increase 44% over 2010
Graphene™ Products
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11/29/11
CVD Equipment Corporation Offers Three Dimensional Graphene™ Products
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11/28/11
CVD Equipment Corporation to Participate in the 7th Annual Livingston Nanotech Conference
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11/14/11
CVD Announces Record 3 and 9 Months 2011 Results
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10/19/11
CVD Announces Expansion of its Materials Business
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10/17/11
CVD Equipment Expands
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08/31/11
CVD Equipment Corporation has been invited to present at 3 Conferences during the week of September 12, 2011
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08/10/11
CVD Equipment Corporation Announces Record 2011 Results
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1860 Smithtown Avenue | Ronkonkoma, NY 11779 | Tel 631.981.7081 | Fax 631.981.7095
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