EasyTube 2000

Turnkey solution for nanomaterial synthesis
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EasyTube 3000

The most advanced tool for the synthesis of nanotube...
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EasyTube™ 6000

Offered for Carbon Nanotubes (CNT), Nanowires, Oxidation, Annealing,...
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LPCVD - High Purity Gas Delivery System

Including Mass Flow Controllers, Pneumatically operated valves...
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LPCVD - End Cap Assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Vacuum Pump

Piston pump to evaculate the loadlock to equalize pressure with...
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LPCVD - Hot Wall Furnace Chamber

Boat of wafers loading into Hot Wall Furnace Chamber...
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UHVCVD - Multi-Chamber Cluster Tool

Dual chamber UHVCVD/LPCVD for Si/SiGe epitaxial deposition...
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UHVCVD - Chamber Cluster Tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

Contains the RF Matching Unit delivering power to the upper electrode within...
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Metalorganic CVD System

For compound semiconductors material deposition...
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Metalorganic CVD System - Chamber

Offers Stainless Steel or Quartz Chamber...
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Multi-Chamber Cluster System

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Infrared Heated Susceptor

Infrared Heated Susceptor shows portion of Reel to Reel...
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Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Isolated Showerhead/Heater in our ALD systems...
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Liquid Phase Epitaxial Reactor System

Provides optimum control over III-V and II-VI wafer processing...
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Liquid Phase Epitaxial Reactor System - Loadlock

LPE with loading tray to transfer to and from the glove box...
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Liquid Phase Epitaxial Reactor System - Airgun with Glove Ports

Inert gas spray gun within glove box...
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Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

Rolling furnace in retracted system.
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Rapid Thermal Processing - Chamber

Provides extremely rapid heating and cooling of substrates...
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Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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Rapid Thermal Processing - Hot Process Chamber

Hot Process underpower from end view...
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Rapid Thermal Processing - Chamber Lid

Infrared lamp array on the RTP chamber lid...
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Hydrogen Chloride Etching System

Process Chamber and Operator control station for Hydrogen Chloride Etching Systems...
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Customized System - Deluge System

Provides protection within explosive environments using infrared sensors....
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Customized System - RTP Process Chamber

Infrared Heated Process Chamber.....
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Supporting Equipment - Gas Cabinet

Designed to cover a wide range of cylinder gas delivery applications...
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Fabricated Quartzware - Wafer Boats

Standard and customized wafer boats for various wafer sizes...
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Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Quartz Shop - Custom Quartz Fabricated

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

CVD's provides a 4 port UHV Wafer Transfer Chamber...
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Motion Control/Vacuum Chamber

Wafer Transfer Chamber & Sputter Etch Chamber...
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Boron Doped ZnO LPCVD Thin film Coating

Boron Doped ZnO deposited at 150° by LPCVD process, best film 5 Ω/□, 2.5 µm, 1.3 10-3 Ωcm....
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Boron Doped ZnO LPCVD Thin film Coating Graph

Transmission & reflection of Float Glass sheet & Boron doped Zinc Oxide coated Float Glass sheet with...
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Boron Doped ZnO LPCVD Thin film Coating - Side View

Side view of B:ZnO LPCVD Thin Film Coating...
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Boron Doped ZnO LPCVD Thin film Coating - Top View

Top view of high magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Boron Doped ZnO LPCVD Thin film Coating - Top View Lower

Top view of lower magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Boron Doped ZnO LPCVD Thin film Coating - Top View Lower

Top view of lower magnification of B:ZnO LPCVD Thin Film Coating over SiCxOy...
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Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO

Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO coatings on soda lime glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Side view of F:ZnO APCVD Thin Film Coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Magnified side view of F:ZnO APCVD Thin Film Coating over SiCxOy film coated on float glass...
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Fluorine Doped ZnO APCVD Thin film Coating

Front view of F:ZnO APCVD Thin Film Coating...
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CVDGraphene™ on a 4" Silicon Wafer

CVDGraphene™ on a 4" Silicon Wafer with SiO2/Ni film...
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CVDGraphene™ (Cu) Copper Foil

Monolayer CVDGraphene™ on Cu Foil 50 – 300 mm x 50 – 250 mm...
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CVDGraphene™ Raman Spectra

Raman spectra from single layer CVDGraphene™ film onto a SiO2 film from Graphene layer grown on a Copper Foil...
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