TCO Coating

Online & Offline APCVD Large Scale Thin Film Solar Cell Production Equipment

Transparent Conductive Oxide (TCO) coating is a key process in large scale thin film solar cell manufacturing. CVD Equipment provides online and offline CVDgCoat™ APCVD for fluoride doped SnO2 (SnO2:F) coating and offline LPCVD for ZnO coating.

TCO can be coated on soda lime glass sheets, on a wide variety of metal foils and plastic with substrate widths up to 4 meters for offline and for online systems. They can be optimized for rough coating with high HAZE for solar applications and with low HAZE for Low-E and other smart glass applications.

Our TCO deposition products focus on Fluorine doped tin oxide (F:SnO2 or FTO) for both off-line and on-line TCO coatings

We also develop low temperature (150 °C) Boron doped Zinc Oxide (B:ZnO or BZO) deposition processes for foils, plastic and glass by LPCVD processes and higher temperature (450-550 °C) Fluorine doped Zinc Oxide (F:ZnO or FZO) on glass.

Fluorine doped Zinc Oxide has the potential to have 4X better performance for solar applications than Boron doped Zinc oxide but requires higher deposition temperatures.

Please contact us for further details.