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SiCxOy APCVD Thin Film Coating from Solid Silane-Free
Si-Methyl Precursors

Top View of Boron doped ZnO deposited by LPCVD

Top view SEM image of SiCxOy APCVD Thin Film on float glass deposited by APCVD method using our EasyTube™ 3000.

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