Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO coatings on soda lime glass

Transmission spectra for APCVD F:ZnO and LPCVD B:ZnO coatings on soda lime glass. Deposition conditions for APCVD F:ZnO: growth temperature=400 °C, chamber pressure=760 Torr, Ethanol/DEZ mole ratio=8.5, C3F6/DEZ mole ratio=0.85. For LPCVD B:ZnO: Growth temperature=160 °C, chamber pressure =0.85 Torr, H2O/DEZ mole ratio=1.2, B2H6/DEZ mole ratio=0.03.

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