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Etched Boron ZnO LPCVD Thin Film

Contact Us for More Info on our Lab Services and Process Equipment Sales.

Best film thus far optimized for Solar application (high haze): 2.3 µm thick, 1.4 Ω /□, 1.4x10-4 Ω-cm

Etched Boron ZnO LPCVD Thin Film

SiCxOy barrier under layer with high Haze B: ZnO film (2 µm thick)

Etched in 2% HCl for 10 seconds

Note this B: ZnO film has not yet optimized for low Haze to make it more suitable for DISPLAY APPLICATION.

Please contact us for further details.


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